화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Chiral Nanostructures Studied Using Polarization-Dependent NOLES Imaging
Jarrett JW, Herbert PJ, Dhuey S, Schwartzberg AM, Knappenberger KL
Journal of Physical Chemistry A, 118(37), 8393, 2014
2 Nanoimprint planarization of high aspect ratio nanostructures using inorganic and organic resist materials
Chang ASP, Peroz C, Liang XG, Dhuey S, Harteneck B, Cabrini S
Journal of Vacuum Science & Technology B, 27(6), 2877, 2009
3 Fabrication of novel digital optical spectrometer on chip
Babin S, Peroz C, Bugrov A, Goltsov A, Ivonin I, Yankov V, Dhuey S, Cabrini S, Kley EB, Schmidt H
Journal of Vacuum Science & Technology B, 27(6), 3187, 2009
4 Automatic measurement of electron beam size by beam metrology technique using 20 nm test pattern
Peroz C, Babin S, Machin M, Anderson E, Cabrini S, Dhuey S, Harteneck B
Journal of Vacuum Science & Technology B, 27(6), 3220, 2009
5 Development, installation, and performance of the X-ray stepper JSAL 5C
Leonard Q, Malueg D, Wallace J, Taylor JW, Dhuey S, Cerrina F, Boerger B, Selzer R, Yu M, Ma Y, Myers K, Trybendis M, Moon E, Smith HI
Journal of Vacuum Science & Technology B, 23(6), 2896, 2005
6 Minimal zone plates for x-ray lithography
Amy D, Jiang L, Zheng R, Feldman M, Cerrina F, Dhuey S, Leonard Q, Thielman D
Journal of Vacuum Science & Technology B, 22(6), 3570, 2004
7 Modeling, fabrication, and experimental application of clear x-ray phase masks
Malueg DH, Taylor JW, Thielman D, Leonard Q, Dhuey S, Cerrina F
Journal of Vacuum Science & Technology B, 22(6), 3575, 2004