검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Kinetic simulation of metal chemical-vapor deposition on high aspect ratio features in modern very-large-scale-integrated processing Li M, Dew S, Brett M, Smy T Journal of Vacuum Science & Technology B, 18(3), 1343, 2000 |
| 2 |
Electrostatic Scattering of Ionic Species in Low-Pressure Sputtering of Ti and Tin Backhouse CJ, Robbie K, Parks J, Broughton JN, Dew S, Este G, Brett MJ Journal of Vacuum Science & Technology A, 14(4), 2175, 1996 |