검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Application of Particle-in-Cell Simulation to Plasma Source Ion-Implantation Faehl R, Devolder B, Wood B Journal of Vacuum Science & Technology B, 12(2), 884, 1994 |
| No. | Article |
|---|---|
| 1 |
Application of Particle-in-Cell Simulation to Plasma Source Ion-Implantation Faehl R, Devolder B, Wood B Journal of Vacuum Science & Technology B, 12(2), 884, 1994 |