검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
X-ray photoelectron spectroscopy investigation of sidewall passivation films formed during gate etch processes Desvoivres L, Vallier L, Joubert O Journal of Vacuum Science & Technology B, 19(2), 420, 2001 |
| 2 |
Sub-0.1 mu m gate etch processes: Towards some limitations of the plasma technology? Desvoivres L, Vallier L, Joubert O Journal of Vacuum Science & Technology B, 18(1), 156, 2000 |