검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Process Kit and Wafer Temperature Effects on Dielectric Etch Rate and Uniformity of Electrostatic Chuck Shan HC, Pu BY, Gao H, Ke KH, Lewis J, Welch M, Deshpandey C Journal of Vacuum Science & Technology B, 14(1), 521, 1996 |