검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin films Dergez D, Schneider M, Bittner A, Pawlak N, Schmid U Thin Solid Films, 606, 7, 2016 |
| 2 |
Fundamental properties of a-SiNx: H thin films deposited by ICP-PECVD for MEMS applications Dergez D, Schalko J, Bittner A, Schmid U Applied Surface Science, 284, 348, 2013 |