검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Immersion patterning down to 27 nm half pitch Bloomstein TM, Fedynyshyn TH, Pottebaum I, Marchant MF, Deneault SJ, Rothschild M Journal of Vacuum Science & Technology B, 24(6), 2789, 2006 |
| 2 |
Direct patterning of spin-on glass with 157 nm lithography: Application to nanoscale crystal growth Bloomstein TM, Juodawlkis PW, Swint RB, Cann SG, Deneault SJ, Efremow NN, Hardy DE, Marchant MF, Napoleone A, Oakley DC, Rothschild M Journal of Vacuum Science & Technology B, 23(6), 2617, 2005 |
| 3 |
Method for testing electronic self-assembled monolayers using a flip-chip arrangement Spector SJ, Wynn CM, Switkes M, Kunz RR, Deneault SJ, Rothschild M Journal of Vacuum Science & Technology B, 21(6), 2865, 2003 |