검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition for micromechanical system applications Biasotto C, Diniz JA, Daltrini AM, Moshkalev SA, Monteiro MJR Thin Solid Films, 516(21), 7777, 2008 |
| 2 |
Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma Biasotto C, Daltrini AM, Teixeira RC, Boscoli FA, Diniz JA, Moshkalev SA, Doi I Journal of Vacuum Science & Technology B, 25(4), 1166, 2007 |
| 3 |
Efficacy of ECR-CVD silicon nitride passivation in InGaP/GaAs HBTs Zoccal LB, Diniz JA, Doi I, Swart JW, Daltrini AM, Moshkalyov SA Journal of Vacuum Science & Technology B, 24(4), 1762, 2006 |