검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Remote microwave plasma source for cleaning chemical vapor deposition chambers: Technology for reducing global warming gas emissions Raoux S, Tanaka T, Bhan M, Ponnekanti H, Seamons M, Deacon T, Xia LQ, Pham F, Silvetti D, Cheung D, Fairbairn K, Jonhson A, Pearce R, Langan J Journal of Vacuum Science & Technology B, 17(2), 477, 1999 |