검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Depth dependence of hydrogenation using electron cyclotron plasma in GaAs-on-Si solar cell structures Kakinuma H, Ueda T, Gotoh S, Akiyama M Journal of Vacuum Science & Technology A, 17(2), 453, 1999 |
| No. | Article |
|---|---|
| 1 |
Depth dependence of hydrogenation using electron cyclotron plasma in GaAs-on-Si solar cell structures Kakinuma H, Ueda T, Gotoh S, Akiyama M Journal of Vacuum Science & Technology A, 17(2), 453, 1999 |