검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Direct simulation Monte Carlo of monosilane low pressure chemical vapor deposition Hsu CC, Lee LL, Tsai DS Journal of The Chinese Institute of Chemical Engineers, 29(6), 427, 1998 |
| 2 |
The kinetics of the low-pressure chemical vapor deposition of polycrystalline silicon from silane Weerts WLM, de Croon MHJM, Marin GB Journal of the Electrochemical Society, 145(4), 1318, 1998 |