검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Prediction and experimental determination of the layer thickness in SIMS depth profiling of Ge/Si multilayers: Effect of preferential sputtering and atomic mixing Lian SY, Kim KJ, Kim TG, Hofmann S, Wang JY Applied Surface Science, 481, 1103, 2019 |
| 2 |
Depth profiling of emerging materials for semiconductor devices Ronsheim PA Applied Surface Science, 252(19), 7201, 2006 |
| 3 |
Imaging with mass spectrometry Pacholski ML, Winograd N Chemical Reviews, 99(10), 2977, 1999 |