검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sidewall slope control of chemically assisted ion-beam etched structures in InP-based materials Daleiden J, Czotscher K, Hoffmann C, Kiefer R, Klussmann S, Muller S, Nutsch A, Pletschen W, Weisser S, Trankle G, Braunstein J, Weimann G Journal of Vacuum Science & Technology B, 16(4), 1864, 1998 |