검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Growth and properties of W-Si-N diffusion barriers deposited by chemical vapor deposition Fleming JG, Roherty-Osmun E, Smith PM, Custer JS, Kim YD, Kacsich T, Nicolet MA, Galewski CJ Thin Solid Films, 320(1), 10, 1998 |
| No. | Article |
|---|---|
| 1 |
Growth and properties of W-Si-N diffusion barriers deposited by chemical vapor deposition Fleming JG, Roherty-Osmun E, Smith PM, Custer JS, Kim YD, Kacsich T, Nicolet MA, Galewski CJ Thin Solid Films, 320(1), 10, 1998 |