검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Hyper NA water immersion lithography at 193 nm and 248 nm Smith BW, Fan YF, Zhou JM, Bourov A, Zavyalova L, Lafferty N, Cropanese F, Estroff A Journal of Vacuum Science & Technology B, 22(6), 3439, 2004 |
| No. | Article |
|---|---|
| 1 |
Hyper NA water immersion lithography at 193 nm and 248 nm Smith BW, Fan YF, Zhou JM, Bourov A, Zavyalova L, Lafferty N, Cropanese F, Estroff A Journal of Vacuum Science & Technology B, 22(6), 3439, 2004 |