검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers Zhao L, Lofrano M, Croes K, Van Besien E, Tokei Z, Wilson CJ, Degraeve R, Kauerauf T, Beyer GP, Claeys C Thin Solid Films, 520(1), 662, 2011 |
| 2 |
Analysis and characterization of a mechanical sensor to monitor stress in interconnect features Wilson CJ, Croes K, Tokei Z, Beyer GP, Gallacher BJ, Bull SJ, Horsfall AB, O'Neill AG Thin Solid Films, 519(1), 443, 2010 |