검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparison of Masking Materials for High Microwave-Power CH4/H-2/Ar Etching of III-V Semiconductors Lee JW, Crockett RV, Pearton SJ Journal of Vacuum Science & Technology B, 14(3), 1752, 1996 |
| No. | Article |
|---|---|
| 1 |
Comparison of Masking Materials for High Microwave-Power CH4/H-2/Ar Etching of III-V Semiconductors Lee JW, Crockett RV, Pearton SJ Journal of Vacuum Science & Technology B, 14(3), 1752, 1996 |