검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3 Cossou B, Jacques S, Couegnat G, King SW, Li L, Lanford WA, Bhattarai G, Paquette M, Chollon G Thin Solid Films, 681, 47, 2019 |