검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Plasma-Induced Damage in a Planar Inductively-Coupled Etch Reactor Cotler TJ, Forster J, Barnes M, Kocon W Journal of the Electrochemical Society, 141(11), 3218, 1994 |
| 2 |
Infrared-Absorption Spectroscopy for Monitoring Condensable Gases in Chemical-Vapor-Deposition Applications Oneill JA, Passow ML, Cotler TJ Journal of Vacuum Science & Technology A, 12(3), 839, 1994 |