검색결과 : 2건
No. | Article |
---|---|
1 |
Submicrometer platinum electrodes by through-mask plating Saenger KL, Costrini G, Kotecki DE, Kwietniak KT, Andricacos PC Journal of the Electrochemical Society, 148(11), C758, 2001 |
2 |
Electromigration in AlCu lines: comparison of Dual Damascene and metal reactive ion etching Filippi RG, Gribelyuk MA, Joseph T, Kane T, Sullivan TD, Clevenger LA, Costrini G, Gambino J, Iggulden RC, Kiewra EW, Ning XJ, Ravikumar R, Schnabel RF, Stojakovic G, Weber SJ, Gignac LM, Hu CK, Rath DL, Rodbell KP Thin Solid Films, 388(1-2), 303, 2001 |