검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Atomic fluorine beam etching of silicon and related materials Larson PR, Copeland KA, Dharmasena G, Lasell RA, Keil M, Johnson MB Journal of Vacuum Science & Technology B, 18(1), 307, 2000 |
| No. | Article |
|---|---|
| 1 |
Atomic fluorine beam etching of silicon and related materials Larson PR, Copeland KA, Dharmasena G, Lasell RA, Keil M, Johnson MB Journal of Vacuum Science & Technology B, 18(1), 307, 2000 |