검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Profile simulation of high aspect ratio contact etch Kim D, Hudson EA, Cooperberg D, Edelberg E, Srinivasan M Thin Solid Films, 515(12), 4874, 2007 |
| 2 |
Feature-scale model of Si etching in SF6 plasma and comparison with experiments Belen RJ, Gomez S, Kiehlbauch M, Cooperberg D, Aydil ES Journal of Vacuum Science & Technology A, 23(1), 99, 2005 |
| 3 |
Feature-scale model of Si etching in SF6/O-2 plasma and comparison with experiments Belen RJ, Gomez S, Cooperberg D, Kiehlbauch M, Aydil ES Journal of Vacuum Science & Technology A, 23(5), 1430, 2005 |