검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Reduction of dry etch damage to GaAs using pulse-time modulated plasmas Khanna R, Stafford L, Pearton SJ, Wang HT, Ren F, Westermann R, Johnson D, Constantine C Electrochemical and Solid State Letters, 10(5), H139, 2007 |
| 2 |
High density plasma damage in InGaP/GaAs and AlGaAs/GaAs high electron mobility transistors Lee JW, Pearton SJ, Ren F, Kopf RF, Kuo JM, Shul RJ, Constantine C, Johnson D Journal of the Electrochemical Society, 145(11), 4036, 1998 |
| 3 |
Comparison of inductively coupled plasma Cl-2 and Cl-4/H-2 etching of III-nitrides Cho H, Vartuli CB, Donovan SM, Abernathy CR, Pearton SJ, Shul RJ, Constantine C Journal of Vacuum Science & Technology A, 16(3), 1631, 1998 |
| 4 |
Inductively-Coupled Plasma Etch Damage in GaAs and InP Schottky Diodes Lee JW, Abernathy CR, Pearton SJ, Ren F, Hobson WS, Shul RJ, Constantine C, Barratt C Journal of the Electrochemical Society, 144(4), 1417, 1997 |
| 5 |
Inductively-Coupled Plasma-Etching of III-V Nitrides in CH4/H-2/Ar and CH4/H-2/N-2 Chemistries Vartuli CB, Pearton SJ, Lee JW, Mackenzie JD, Abernathy CR, Shul RJ, Constantine C, Barratt C Journal of the Electrochemical Society, 144(8), 2844, 1997 |
| 6 |
Inductively-Coupled Ar Plasma Damage in AlGaAs Lee JW, Hays D, Abernathy CR, Pearton SJ, Hobson WS, Constantine C Journal of the Electrochemical Society, 144(9), L245, 1997 |
| 7 |
High-Density Plasma-Etching of Compound Semiconductors Shul RJ, Mcclellan GB, Briggs RD, Rieger DJ, Pearton SJ, Abernathy CR, Lee JW, Constantine C, Barratt C Journal of Vacuum Science & Technology A, 15(3), 633, 1997 |
| 8 |
Dry Etch Damage in GaAs Metal-Semiconductor Field-Effect Transistors Exposed to Inductively-Coupled Plasma and Electron-Cyclotron-Resonance Ar Plasmas Ren F, Lee JW, Abernathy CR, Pearton SJ, Constantine C, Barratt C, Shul RJ Journal of Vacuum Science & Technology B, 15(4), 983, 1997 |
| 9 |
Comparison of ICl and IBr Plasma Chemistries for Etching of InGaAlP Alloys Hong J, Lee JW, Lambers ES, Abernathy CR, Pearton SJ, Constantine C, Hobson WS Journal of the Electrochemical Society, 143(11), 3656, 1996 |
| 10 |
Etching of GaAs/AlGaAs Rib Wave-Guide Structures Using BCl3/Cl-2/N-2/Ar Electron-Cyclotron-Resonance Constantine C, Shul RJ, Sullivan CT, Snipes MB, Mcclellan GB, Hafich M, Fuller CT, Mileham JR, Pearton SJ Journal of Vacuum Science & Technology B, 13(5), 2025, 1995 |