검색결과 : 1건
No. | Article |
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1 |
A quantitative adhesion study between contacting materials in Cu damascene structures Lanckmans F, Brongersma SH, Varga I, Poortmans S, Bender H, Condard T, Maex K Applied Surface Science, 201(1-4), 20, 2002 |
No. | Article |
---|---|
1 |
A quantitative adhesion study between contacting materials in Cu damascene structures Lanckmans F, Brongersma SH, Varga I, Poortmans S, Bender H, Condard T, Maex K Applied Surface Science, 201(1-4), 20, 2002 |