검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dynamic Rate and Thickness Metrology During Poly-Si Rapid Thermal Chemical-Vapor-Deposition from SiH4 Using Real-Time in-Situ Mass-Spectrometry (Vol 14, Pg 267, 1996) Tedder LL, Rubloff GW, Conaghan BF, Parsons GN Journal of Vacuum Science & Technology A, 14(4), 2680, 1996 |