검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of colloidal silica abrasives with different sizes and their chemical-mechanical polishing performance on 4H-SiC (0 0 0 1) Shi XL, Pan GS, Zhou Y, Gu ZH, Gong H, Zou CL Applied Surface Science, 307, 414, 2014 |