검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization by medium energy ion scattering of damage and dopant profiles produced by ultrashallow B and As implants into Si at different temperatures Van den Berg JA, Armour DG, Zhang S, Whelan S, Ohno H, Wang TS, Cullis AG, Collart EHJ, Goldberg RD, Bailey P, Noakes TCQ Journal of Vacuum Science & Technology B, 20(3), 974, 2002 |