검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Texture investigation in the trench depth direction of very fine copper wires less than 100 nm wide using electron backscatter diffraction Khoo K, Onuki J Thin Solid Films, 518(12), 3413, 2010 |
| No. | Article |
|---|---|
| 1 |
Texture investigation in the trench depth direction of very fine copper wires less than 100 nm wide using electron backscatter diffraction Khoo K, Onuki J Thin Solid Films, 518(12), 3413, 2010 |