화학공학소재연구정보센터
검색결과 : 54건
No. Article
1 Two-dimensional carrier mapping at the nanometer-scale on 32 nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy
Eyben P, Clarysse T, Mody J, Nazir A, Schulze A, Hantschel T, Vandervorst W
Solid-State Electronics, 71, 69, 2012
2 Understanding device performance by incorporating 2D-carrier profiles from high resolution scanning spreading resistance microscopy into device simulations
Nazir A, Eyben P, Clarysse T, Hellings G, Schulze A, Mody J, De Meyer K, Bender H, Vandervorst W
Solid-State Electronics, 74, 38, 2012
3 In-situ Ga doping of fully strained Ge1-xSnx heteroepitaxial layers grown on Ge(001) substrates
Shimura Y, Takeuchi S, Nakatsuka O, Vincent B, Gencarelli F, Clarysse T, Vandervorst W, Caymax M, Loo R, Jensen A, Petersen DH, Zaima S
Thin Solid Films, 520(8), 3206, 2012
4 Ultra Shallow Arsenic Junctions in Germanium Formed by Millisecond Laser Annealing
Hellings G, Rosseel E, Simoen E, Radisic D, Petersen DH, Hansen O, Nielsen PF, Zschatzsch G, Nazir A, Clarysse T, Vandervorst W, Hoffmann TY, De Meyer K
Electrochemical and Solid State Letters, 14(1), II39, 2011
5 Ge Chemical Vapor Deposition on GaAs for Low Resistivity Contacts
Vincent B, Firrincieli A, Wang WE, Waldron N, Franquet A, Douhard B, Vandervorst W, Clarysse T, Brammertz G, Loo R, Dekoster J, Meuris M, Caymax M
Journal of the Electrochemical Society, 158(3), H203, 2011
6 Ge1-xSnx stressors for strained-Ge CMOS
Takeuchi S, Shimura Y, Nishimura T, Vincent B, Eneman G, Clarysse T, Demeulemeester J, Vantomme A, Dekoster J, Caymax M, Loo R, Sakai A, Nakatsuka O, Zaima S
Solid-State Electronics, 60(1), 53, 2011
7 Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Bogdanowicz J, Dortu F, Clarysse T, Vandervorst W, Rosseel E, Nguyen ND, Shaughnessy D, Salnik A, Nicolaides L
Journal of Vacuum Science & Technology B, 28(1), C1C1, 2010
8 Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Clarysse T, Moussa A, Parmentier B, Bogdanowicz J, Vandervorst W, Bender H, Pfeffer M, Schellenberger M, Nielsen PF, Thorsteinsson S, Lin R, Petersen D
Journal of Vacuum Science & Technology B, 28(1), C1C8, 2010
9 Study of submelt laser induced junction nonuniformities using Therma-Probe
Rosseel E, Bogdanowicz J, Clarysse T, Vandervorst W, Ortolland C, Hoffmann T, Salnik A, Nicolaides L, Han SH, Petersen DH, Lin R, Hansen O
Journal of Vacuum Science & Technology B, 28(1), C1C21, 2010
10 Review of electrical characterization of ultra-shallow junctions with micro four-point probes
Petersen DH, Hansen O, Hansen TM, Boggild P, Lin R, Kjaer D, Nielsen PF, Clarysse T, Vandervorst W, Rosseel E, Bennett NS, Cowern NEB
Journal of Vacuum Science & Technology B, 28(1), C1C27, 2010