검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Silicon deposition from BCI3/SiH4 mixtures: Effect of very high boron concentration on microstructure Herner SB, Clark MH Journal of Vacuum Science & Technology B, 22(1), 1, 2004 |
| 2 |
Secondary ion mass spectrometry induced damage adjacent to analysis craters in silicon Clark MH, Jones KS, Stevie FA Journal of Vacuum Science & Technology A, 20(5), 1663, 2002 |