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| No. | Article |
|---|---|
| 1 |
Improvement of PECVD Silicon-Germanium Crystallization for CMOS Compatible MEMS Applications Guo B, Severi S, Bryce G, Claes G, Van Hoof R, Du Bois B, Haspeslagh L, Witvrouw A, Decoutere S Journal of the Electrochemical Society, 157(2), D103, 2010 |