검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Properties and thermal stability of chemically vapor deposited W-rich WSix thin films Wang MT, Lin YC, Chuang MS, Chun MC, Chen LJ, Chen MC Journal of Vacuum Science & Technology B, 17(2), 385, 1999 |
| No. | Article |
|---|---|
| 1 |
Properties and thermal stability of chemically vapor deposited W-rich WSix thin films Wang MT, Lin YC, Chuang MS, Chun MC, Chen LJ, Chen MC Journal of Vacuum Science & Technology B, 17(2), 385, 1999 |