검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Enhancing the thermal stability of low dielectric constant hydrogen silsesquioxane by ion implantation Chang TC, Chou MF, Mei YJ, Tsang JS, Pan FM, Wu WF, Tsai MS, Chang CY, Shih FY, Huang HD Thin Solid Films, 332(1-2), 351, 1998 |