검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of nitrogen addition on the properties and thermal stability of fluorinate amorphous carbon films Lai CH, Lai WS, Chiue HC, Chen HJ, Chang SY, Lin SJ Thin Solid Films, 510(1-2), 125, 2006 |
| 2 |
Processing and characterization of fluorinated amorphous carbon low-dielectric-constant films Chen HJ, Chang SY, Chiue HC, Lai WS, Lin SJ Journal of the Electrochemical Society, 151(11), F276, 2004 |