검색결과 : 1건
No. | Article |
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1 |
Si/SiGe growth by low-energy plasma-enhanced chemical vapor deposition Pin G, Kermarrec O, Chabanne G, Campidelli Y, Chevrier JB, Billon T, Bensahel D Journal of Crystal Growth, 286(1), 11, 2006 |
No. | Article |
---|---|
1 |
Si/SiGe growth by low-energy plasma-enhanced chemical vapor deposition Pin G, Kermarrec O, Chabanne G, Campidelli Y, Chevrier JB, Billon T, Bensahel D Journal of Crystal Growth, 286(1), 11, 2006 |