검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching Chen T, Pan A, Li CX, Si JH, Hou X Applied Surface Science, 325, 145, 2015 |
| 2 |
Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching Khuat V, Ma YC, Si JH, Chen T, Chen F, Hou X Applied Surface Science, 289, 529, 2014 |
| 3 |
A simple method for fabrication of high-aspect-ratio all-silicon grooves Ma YC, Pan A, Si JH, Chen T, Chen F, Hou X Applied Surface Science, 284, 372, 2013 |