화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Formation Mechanism of Tin by Reaction of Tetrakis(Dimethylamido)-Titanium with Plasma-Activated Nitrogen
Weber A, Klages CP, Gross ME, Charatan RM, Brown WL
Journal of the Electrochemical Society, 142(6), L79, 1995
2 Low-Temperature Deposition of Tin Using Tetrakis(Dimethylamido)-Titanium in an Electron-Cyclotron-Resonance Plasma Process
Weber A, Nikulski R, Klages CP, Gross ME, Brown WL, Dons E, Charatan RM
Journal of the Electrochemical Society, 141(3), 849, 1994