검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Smooth and vertical-sidewall InP etching using Cl-2/N-2 inductively coupled plasma Lin J, Leven A, Weimann NG, Yang Y, Kopf RF, Reyes R, Chen YK, Chao FS Journal of Vacuum Science & Technology B, 22(2), 510, 2004 |
| No. | Article |
|---|---|
| 1 |
Smooth and vertical-sidewall InP etching using Cl-2/N-2 inductively coupled plasma Lin J, Leven A, Weimann NG, Yang Y, Kopf RF, Reyes R, Chen YK, Chao FS Journal of Vacuum Science & Technology B, 22(2), 510, 2004 |