검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A model for the etching of nanoporous silica in C4F8 plasmas based on pore geometry and porosity effects Cho WJ, Rodriguez O, Saxena R, Ojha M, Chanta RA, Plawsky JL, Gill WN Journal of the Electrochemical Society, 152(2), F26, 2005 |