검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Parametric study on synthesis of crystalline silicon nanoparticles in capacitively-coupled silane plasmas Chai KB, Seon CR, Moon SY, Choe W Thin Solid Films, 518(22), 6614, 2010 |
| No. | Article |
|---|---|
| 1 |
Parametric study on synthesis of crystalline silicon nanoparticles in capacitively-coupled silane plasmas Chai KB, Seon CR, Moon SY, Choe W Thin Solid Films, 518(22), 6614, 2010 |