화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Structural variations in polysilicon, associated with deposition temperature and degree of anneal
Parr AA, Gardiner DJ, Carline RT, King DO, Williams GM
Journal of Materials Science, 36(1), 207, 2001
2 In situ optical monitoring for SiGe epitaxy
Robbins DJ, Pickering C, Russell J, Carline RT, Dann AW, Marrs AD, Glasper JL
Journal of Crystal Growth, 209(2-3), 290, 2000
3 Characterization of oxide layers on GaAs substrates
Allwood DA, Carline RT, Mason NJ, Pickering C, Tanner BK, Walker PJ
Thin Solid Films, 364(1-2), 33, 2000
4 Optical properties of bonded silicon silicide on insulator ((SOI)-O-2) : a new substrate for electronic and optical devices
Nayar V, Russell J, Carline RT, Pidduck AJ, Quinn C, Nevin A, Blackstone S
Thin Solid Films, 313-314, 276, 1998
5 Real-time photo-spectroscopic ellipsometry measurement of electric field and composition in semiconductors
Carline RT, Russell J, Hosea TJC, Thomas PJS, Pickering C
Thin Solid Films, 313-314, 579, 1998
6 Real-Time Control of Layer Thickness in LPCVD Si/Si.Ge-88.(12) HBT Structures
Hope DA, Pickering C, Carline RT, Leong WY, Robbins DJ
Thin Solid Films, 294(1-2), 18, 1997
7 Real-Time Spectroscopic Ellipsometry Monitoring of Si1-xGex/Si Epitaxial-Growth
Pickering C, Hope DA, Carline RT, Robbins DJ
Journal of Vacuum Science & Technology A, 13(3), 740, 1995