검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The dependence of the etching property of CoSi2 films in diluted HF solutions on the formation conditions Zhu SY, Ru GP, Detavernier C, Van Meirhaeghe RL, Cardon E, Li BZ Applied Surface Science, 178(1-4), 44, 2001 |
| No. | Article |
|---|---|
| 1 |
The dependence of the etching property of CoSi2 films in diluted HF solutions on the formation conditions Zhu SY, Ru GP, Detavernier C, Van Meirhaeghe RL, Cardon E, Li BZ Applied Surface Science, 178(1-4), 44, 2001 |