검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Double patterning overlay budget for 45 nm technology node single and double mask approach Rigolli P, Turco C, Iessi U, Capetti G, Canestrari P, Fradilli A Journal of Vacuum Science & Technology B, 25(6), 2461, 2007 |
| No. | Article |
|---|---|
| 1 |
Double patterning overlay budget for 45 nm technology node single and double mask approach Rigolli P, Turco C, Iessi U, Capetti G, Canestrari P, Fradilli A Journal of Vacuum Science & Technology B, 25(6), 2461, 2007 |