검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ultrathin membrane masks for electron projection lithography Wood OR, Trybula WJ, Greschner J, Kalt S, Bayer T, Shimizu S, Yamamoto H, Suzuki K, Gordon MS, Robinson CF, Dhaliwal RS, Thiel CW, Caldwell N, Lawliss MS, Huang C Journal of Vacuum Science & Technology B, 22(6), 3072, 2004 |
| 2 |
Patterning-induced image placement distortions on electron beam projection lithography membrane masks Lercel M, Magg C, Lawliss M, Williams C, Caldwell N, Ackel R, Kindt L, Racette K, Reu P, Engelstad R, Mackay S Journal of Vacuum Science & Technology B, 19(6), 2671, 2001 |
| 3 |
Fabrication of masks for electron-beam projection lithography Lercel M, Magg C, Barrett M, Collins K, Trybendis M, Caldwell N, Jeffer R, Bouchard L Journal of Vacuum Science & Technology B, 18(6), 3210, 2000 |