화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Pocket surface and slip defect in Si epitaxy
Wang TY, Carlson DJ
Journal of Crystal Growth, 287(2), 419, 2006
2 Optical emission spectroscopy of a PCVD process used for the deposition of TiN on cemented carbides
Peter S, Richter F, Tabersky R, Konig U
Thin Solid Films, 377-378, 430, 2000
3 Chemical-Vapor-Deposition of Silicon from Disilane Under Reduced Pressure in a Circular Impinging Jet Reactor - Simulation and Experiments
Wang YB, Teyssandier F, Simon J, Feurer R
Journal of the Electrochemical Society, 141(3), 824, 1994