검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low temperature metal-organic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization Kelsey JE, Goldberg C, Nuesca G, Peterson G, Kaloyeros AE, Arkles B Journal of Vacuum Science & Technology B, 17(3), 1101, 1999 |