검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
MEMS on cavity-SOI wafers Luoto H, Henttinen K, Suni T, Dekker J, Makinen J, Torkkeli A Solid-State Electronics, 51(2), 328, 2007 |
| No. | Article |
|---|---|
| 1 |
MEMS on cavity-SOI wafers Luoto H, Henttinen K, Suni T, Dekker J, Makinen J, Torkkeli A Solid-State Electronics, 51(2), 328, 2007 |