검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ion and neutral species in C2F6 and CHF3 dielectric etch discharges Jayaraman R, McGrath RT, Hebner GA Journal of Vacuum Science & Technology A, 17(4), 1545, 1999 |
| No. | Article |
|---|---|
| 1 |
Ion and neutral species in C2F6 and CHF3 dielectric etch discharges Jayaraman R, McGrath RT, Hebner GA Journal of Vacuum Science & Technology A, 17(4), 1545, 1999 |