검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Crystalline SiC thin films deposited at room temperature using pulsed laser ablation of graphite and magnetron sputtering of silicon Nainaparampil JJ, Zabinski JS Journal of Vacuum Science & Technology A, 17(3), 909, 1999 |
| No. | Article |
|---|---|
| 1 |
Crystalline SiC thin films deposited at room temperature using pulsed laser ablation of graphite and magnetron sputtering of silicon Nainaparampil JJ, Zabinski JS Journal of Vacuum Science & Technology A, 17(3), 909, 1999 |