화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Raman and TEM characterization of high fluence C implanted nanometric Si on insulator
dos Reis RMS, Maltez RL, Moreira EC, Dias YP, Boudinov H
Applied Surface Science, 258(19), 7395, 2012
2 The photoluminescence of SiCN thin films prepared by C+ implantation into alpha-SiNx:H
Liu YZ, Zhang X, Chen CO, Zhang GB, Xu PS, Chen DP, Dong LJ
Thin Solid Films, 518(15), 4363, 2010
3 The study of ion mixed amorphous carbon films on single crystal silicon by C ion implantation
Sun R, Xu T, Zhang JW, Xue QJ
Applied Surface Science, 252(12), 4236, 2006
4 Al and Al/C high dose implantation in 4H-SiC
Bluet JM, Pernot J, Billon T, Contreras S, Michaud JF, Robert JL, Camassel J
Materials Science Forum, 338-3, 885, 2000