검색결과 : 4건
No. | Article |
---|---|
1 |
Raman and TEM characterization of high fluence C implanted nanometric Si on insulator dos Reis RMS, Maltez RL, Moreira EC, Dias YP, Boudinov H Applied Surface Science, 258(19), 7395, 2012 |
2 |
The photoluminescence of SiCN thin films prepared by C+ implantation into alpha-SiNx:H Liu YZ, Zhang X, Chen CO, Zhang GB, Xu PS, Chen DP, Dong LJ Thin Solid Films, 518(15), 4363, 2010 |
3 |
The study of ion mixed amorphous carbon films on single crystal silicon by C ion implantation Sun R, Xu T, Zhang JW, Xue QJ Applied Surface Science, 252(12), 4236, 2006 |
4 |
Al and Al/C high dose implantation in 4H-SiC Bluet JM, Pernot J, Billon T, Contreras S, Michaud JF, Robert JL, Camassel J Materials Science Forum, 338-3, 885, 2000 |